図書

Gate stack and silicide issues in silicon processing 2 : symposium held April 17-19, 2001, San Francisco, California, U.S.A. : 2001 MRS spring meeting : Apr 2001, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 670)

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Gate stack and silicide issues in silicon processing 2 : symposium held April 17-19, 2001, San Francisco, California, U.S.A. : 2001 MRS spring meeting : Apr 2001, San Francisco, CA.

(Materials Research Society Symposia Proceedings ; 670)

Call No. (NDL)
M17-03-3583
Bibliographic ID of National Diet Library
000004201935
Material type
図書
Author
Campbell, S. A.
Publisher
Materials Research Society
Publication date
c2002.
Material Format
Paper
Capacity, size, etc.
1 v. (various paging) : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
1558996060
Title
Gate stack and silicide issues in silicon processing 2 : symposium held April 17-19, 2001, San Francisco, California, U.S.A. : 2001 MRS spring meeting : Apr 2001, San Francisco, CA.
Series Title
Materials Research Society Symposia Proceedings ; 670
Title Heading
Materials Research Society symposia proceedings.
Author Heading
Campbell, S. A.
Publication, Distribution, etc.
Warrendale : Materials Research Society
Publication Date
c2002.
Publication Date (W3CDTF)
2002
Extent
1 v. (various paging) : ill. ; 24 cm.