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図書

Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003 : Santa Clara, California, USA. : Feb 2003, Santa Clara, CA. (SPIE Proceedings ; 5041)

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Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003 : Santa Clara, California, USA. : Feb 2003, Santa Clara, CA.

(SPIE Proceedings ; 5041)

Call No. (NDL)
M17-04-489
Bibliographic ID of National Diet Library
000004205047
Material type
図書
Author
Tobin, Kenneth W.ほか
Publisher
SPIE
Publication date
c2003.
Material Format
Paper
Capacity, size, etc.
x, 222 p. : ill. (some col.) ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
081944846X
ISSN (series)
0277-786X
Title
Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003 : Santa Clara, California, USA. : Feb 2003, Santa Clara, CA.
Series Title
SPIE Proceedings ; 5041
Title Heading
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 5041.
Author Heading
Tobin, Kenneth W.
Emami, Iraj.
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2003.
Publication Date (W3CDTF)
2003