図書

Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A. : symposium C "silicon front-end junction formation technologies" : 2002 MRS spring meeting : Apr 2002, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 717)

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Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A. : symposium C "silicon front-end junction formation technologies" : 2002 MRS spring meeting : Apr 2002, San Francisco, CA.

(Materials Research Society Symposia Proceedings ; 717)

Call No. (NDL)
M17-03-4531
Bibliographic ID of National Diet Library
000004233918
Material type
図書
Author
Downey, Daniel F.
Publisher
Materials Research Society
Publication date
c2002.
Material Format
Paper
Capacity, size, etc.
xi, 312 p. : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
1558996532
Title
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A. : symposium C "silicon front-end junction formation technologies" : 2002 MRS spring meeting : Apr 2002, San Francisco, CA.
Series Title
Materials Research Society Symposia Proceedings ; 717
Title Heading
Materials Research Society symposia proceedings ; v. 717.
Author Heading
Downey, Daniel F.
Publication, Distribution, etc.
Warrendale : Materials Research Society
Publication Date
c2002.
Publication Date (W3CDTF)
2002
Extent
xi, 312 p. : ill. ; 24 cm.