Micromachining and microfabrication process technology and devices : 7-9 November 2001 : Nanjing, China. : Nov 2001, Nanjing, China. (SPIE Proceedings ; 4601)

Micromachining and microfabrication process technology and devices : 7-9 November 2001 : Nanjing, China. : Nov 2001, Nanjing, China.

(SPIE Proceedings ; 4601)

Call No. (NDL): M17-03-4727
Bibliographic ID of National Diet Library: 000004243969

Material type: 図書

Author: SPIE - International Society for Optical Engineering.ほか

Publisher: SPIE

Publication date: c2001.

Material Format: Paper

Capacity, size, etc.: xi, 440 p. : ill. ; 30 cm.

NDC: -

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Note (General)：: Papers."... contributed papers of the Micromachining and Microfabrication Process Technology and Devices conference at the International Symposium on ...

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Paper

Material Type: 図書
ISBN: 0819443409
ISSN (series): 0277-786X
Title: Micromachining and microfabrication process technology and devices : 7-9 November 2001 : Nanjing, China. : Nov 2001, Nanjing, China.
Series Title: SPIE Proceedings ; 4601
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 4601.
Author Heading: SPIE - International Society for Optical Engineering.
Tien, Norman C.
Huang, Qing-An.
Micromachining and Microfabrication Process Technology and Devices Conference (2001 : Nanjing, Jiangsu Sheng, China)
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2001.
Publication Date (W3CDTF): 2001
Extent: xi, 440 p. : ill. ; 30 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Micromachining -- Technological innovations -- Congresses.
Microfabrication -- Technological innovations -- Congresses.
Microelectromechanical devices -- Technological innovations -- Congresses.
Detectors -- Technological innovations -- Congresses.
NDLC: M17
Note (General): Papers.
"... contributed papers of the Micromachining and Microfabrication Process Technology and Devices conference at the International Symposium on Optoelectronics and Microelectronics, " -- introd.
Note (Bibliography): Includes bibliographical references and auhor index.
Holding library: 国立国会図書館
Call No.: M17-03-4727
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004243969
http://id.ndl.go.jp/bib/000004243969
RLIN No.: CTYAFPK1088-B
Bibliographic Record Category (NDL): 215