図書

Fundamental gas-phase and surface chemistry of vapor-phase deposition 2 : and : process control, diagnostics, and modeling in semiconductor manufacturing 4 : proceedings of the internatioal symposia. : ------. (PV ; 01-13)

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Fundamental gas-phase and surface chemistry of vapor-phase deposition 2 : and : process control, diagnostics, and modeling in semiconductor manufacturing 4 : proceedings of the internatioal symposia. : ------.

(PV ; 01-13)

Call No. (NDL)
M17-03-4580
Bibliographic ID of National Diet Library
000004244016
Material type
図書
Author
Swihart, Mark T.ほか
Publisher
Electrochemical Society, Inc.
Publication date
c2001.
Material Format
Paper
Capacity, size, etc.
ix, 508 p. : ill. ; 26 cm.
NDC
-
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Papers."High Temperature Materials and Dielectric Science and Technology Divisions" -- t. p.

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Paper

Material Type
図書
ISBN
1566773199
Title
Fundamental gas-phase and surface chemistry of vapor-phase deposition 2 : and : process control, diagnostics, and modeling in semiconductor manufacturing 4 : proceedings of the internatioal symposia. : ------.
Series Title
PV ; 01-13
Title Heading
Proceedings (Electrochemical Society) ; v. 2001-13.
Author Heading
Swihart, Mark T.
Allendorf, Mark Donald.
Meyyapan, M.
Symposium on Fundamental Gas-Phase and Surface Chemistry of Vaper-Phase Materials Synthesis (2nd : 2001 : Washington, D.C.)
Publication, Distribution, etc.
Pennington : Electrochemical Society, Inc.
Publication Date
c2001.
Publication Date (W3CDTF)
2001
Extent
ix, 508 p. : ill. ; 26 cm.