Emerging lithographic technologies 5 : 27 February-1 March 2001 : Santa Clara, USA. : SPIE microlithography symposium : Feb 2001, Santa Clara, CA. (SPIE Proceedings ; 4343)

Emerging lithographic technologies 5 : 27 February-1 March 2001 : Santa Clara, USA. : SPIE microlithography symposium : Feb 2001, Santa Clara, CA.

(SPIE Proceedings ; 4343)

Call No. (NDL): M17-03-4890
Bibliographic ID of National Diet Library: 000004247559

Material type: 図書

Author: Semiconductor Equipment and Materials International (SEMI)ほか

Publisher: SPIE

Publication date: c2001.

Material Format: Paper

Capacity, size, etc.: xv, 818 p. : ill. (some col.) ; 27 cm.

NDC: -

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Notes on use

Note (General)：: Papers."The conference was part of the SPIE Microlithography Symposium and its point of focus was on post optical lithographies." -- introd.

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Paper

Material Type: 図書
ISBN: 0819440299
ISSN (series): 0277-786X
Title: Emerging lithographic technologies 5 : 27 February-1 March 2001 : Santa Clara, USA. : SPIE microlithography symposium : Feb 2001, Santa Clara, CA.
Series Title: SPIE Proceedings ; 4343
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 4343.
Author Heading: Semiconductor Equipment and Materials International (SEMI)
Dobisz, Elizabeth Ann.
International SEMATECH.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2001.
Publication Date (W3CDTF): 2001
Extent: xv, 818 p. : ill. (some col.) ; 27 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Lithography, Electron beam -- Congresses.
Microlithography -- Industrial applications -- Congresses.
X-ray lithography -- Congresses.
X-rays -- Industrial applications -- Congresses.
Masks (Electronics) -- Congresses.
NDLC: M17
Note (General): Papers.
"The conference was part of the SPIE Microlithography Symposium and its point of focus was on post optical lithographies." -- introd.
Note (Bibliography): Includes bibliographic references and author index.
Holding library: 国立国会図書館
Call No.: M17-03-4890
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004247559
http://id.ndl.go.jp/bib/000004247559
RLIN No.: CSUGA4680365-B
Bibliographic Record Category (NDL): 215