Microfabricated systems and MEMS 5 : proceedings of the international symposium. : Oct 2000, Phoenix, AZ. (PV ; 2000-19)

Microfabricated systems and MEMS 5 : proceedings of the international symposium. : Oct 2000, Phoenix, AZ.

(PV ; 2000-19)

Notes on use

Note (General)：: Papers."Microfabricated Systems and MEMS-V Symposium held in Phoenix, October 2000" -- preface.

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Material Type: 図書
ISBN: 1566772869
Title: Microfabricated systems and MEMS 5 : proceedings of the international symposium. : Oct 2000, Phoenix, AZ.
Series Title: PV ; 2000-19
Title Heading: Proceedings (Electrochemical Society) ; v. 2000-19.
Author Heading: Hesketh, P. J. (Peter J.)
International Symposium on Microfabricated Systems and MEMS (5th : 2000 : Phoenix, Ariz.)
Publication, Distribution, etc.: Pennington : Electrochemical Society, Inc.
Publication Date: c2000.
Publication Date (W3CDTF): 2000
Extent: viii, 258 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Microelectronics -- Congresses.
Microstructure -- Congresses.
Micromechanics -- Congresses.
NDLC: M17
Note (General): Papers.
"Microfabricated Systems and MEMS-V Symposium held in Phoenix, October 2000" -- preface.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-4938
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004248037
http://id.ndl.go.jp/bib/000004248037
RLIN No.: CUBGGLAD84538331-B
Bibliographic Record Category (NDL): 215