Silicon nitride and silicon dioxide thin insulating films : proceedings of the sixth international symposium. : Mar 2001, Washington D.C. (PV ; 2001-7)

Silicon nitride and silicon dioxide thin insulating films : proceedings of the sixth international symposium. : Mar 2001, Washington D.C.

(PV ; 2001-7)

Call No. (NDL): M17-03-4987
Bibliographic ID of National Diet Library: 000004248353

Material type: 図書

Author: Landgrebe, Albert R.ほか

Publisher: Electrochemical Society

Publication date: c2001.

Material Format: Paper

Capacity, size, etc.: x, 286 p. : ill. ; 24 cm.

NDC: -

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Notes on use

Note (General)：: Papers."Dielectric Science and Technology, Electronics, and High Temperature Materials Divisions" -- t. p.

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Paper

Material Type: 図書
ISBN: 156677313X
Title: Silicon nitride and silicon dioxide thin insulating films : proceedings of the sixth international symposium. : Mar 2001, Washington D.C.
Series Title: PV ; 2001-7
Title Heading: Proceedings (Electrochemical Society) ; v. 2001-7.
Author Heading: Landgrebe, Albert R.
Sundaram, K. B.
Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (6th : 2001 : Washington, D.C.)
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2001.
Publication Date (W3CDTF): 2001
Extent: x, 286 p. : ill. ; 24 cm.
Alternative Title: Silicon nitride and silicon dioxide thin insulating films : proceedings of the 6th international symposium
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Thin film devices -- Congresses.
Silicon nitride -- Congresses.
Silicon dioxide -- Congresses.
NDLC: M17
Note (General): Papers.
"Dielectric Science and Technology, Electronics, and High Temperature Materials Divisions" -- t. p.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-4987
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004248353
http://id.ndl.go.jp/bib/000004248353
LC Control Number: 2001092446
https://lccn.loc.gov/2001092446
RLIN No.: CUBGGLAD184905573-B
Bibliographic Record Category (NDL): 215