Silicon nitride and silicon dioxide thin insulating films : proceedings of the sixth international symposium. : Mar 2001, Washington D.C.

• Material Type: 図書
• ISBN: 156677313X
• Title: Silicon nitride and silicon dioxide thin insulating films : proceedings of the sixth international symposium. : Mar 2001, Washington D.C.
• Series Title: PV ; 2001-7
• Title Heading: Proceedings (Electrochemical Society) ; v. 2001-7.
• Author Heading: Landgrebe, Albert R.; Sundaram, K. B.; Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (6th : 2001 : Washington, D.C.)
• Publication, Distribution, etc.: Pennington : Electrochemical Society
• Publication Date: c2001.
• Publication Date (W3CDTF): 2001
• Extent: x, 286 p. : ill. ; 24 cm.
• Alternative Title: Silicon nitride and silicon dioxide thin insulating films : proceedings of the 6th international symposium
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Thin film devices -- Congresses.; Silicon nitride -- Congresses.; Silicon dioxide -- Congresses.
• NDLC: M17
• Note (General): Papers.; "Dielectric Science and Technology, Electronics, and High Temperature Materials Divisions" -- t. p.
• Note (Bibliography): Includes bibliographical references and indexes.
• Holding library: 国立国会図書館
• Call No.: M17-03-4987
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004248353; http://id.ndl.go.jp/bib/000004248353
• LC Control Number: 2001092446; https://lccn.loc.gov/2001092446
• RLIN No.: CUBGGLAD184905573-B
• Bibliographic Record Category (NDL): 215