Sub-half-micron lithography for ULSIs / edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai.

• Material Type: 図書
• ISBN: 0521570808
• Title: Sub-half-micron lithography for ULSIs / edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai.
• Author Heading: 鈴木, 克巳, 1951- スズキ, カツミ, 1951- ( 001160700 )Authorities; 松井, 真二, 1950- マツイ, シンジ, 1950- ( 01013822 )Authorities; 落合, 幸徳 オチアイ, ユキノリ ( 00988847 )Authorities
• Publication, Distribution, etc.: Cambridge : Cambridge University Press; New York : Cambridge University Press
• Publication Date: 2000.
• Publication Date (W3CDTF): 2000
• Extent: xvii, 323 p. : ill. ; 26 cm.
• Place of Publication (Country Code): GB
• Text Language Code: eng
• Subject Heading: Integrated circuits -- Ultra large scale integration -- Design and construction.; Microlithography.; Printed circuits -- Design and construction.
• LCC: TK7874.76
• DDC: 621.39/5
• NDLC: ND386
• Note (General): Related URL: Publisher description http: //www.loc.gov/catdir/description/cam029/99013558.html.; Related URL: Table of contents http: //www.loc.gov/catdir/toc/cam027/99013558.html.
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: ND386-B3
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004255087; http://id.ndl.go.jp/bib/000004255087
• LC Control Number: 99013558; https://lccn.loc.gov/99013558
• RLIN No.: DCLC9913558-B
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 211