Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. : symposium F, "chemical-mechanical planarization" : 2003 MRS spring meeting : Apr 2003, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 767)

Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. : symposium F, "chemical-mechanical planarization" : 2003 MRS spring meeting : Apr 2003, San Francisco, CA.

(Materials Research Society Symposia Proceedings ; 767)

Call No. (NDL): M17-04-1776
Bibliographic ID of National Diet Library: 000004270636

Material type: 図書

Author: Boning, Duane S.ほか

Publisher: Materials Research Society

Publication date: c2003.

Material Format: Paper

Capacity, size, etc.: xi, 348 p. : ill. ; 24 cm.

NDC: -

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Notes on use

Note (General)：: Papers." (...) the sixth in an annual series of CMP symposia associated with the MRS Spring Meeting." -- preface.

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Paper

Material Type: 図書
ISBN: 1558997040
Title: Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. : symposium F, "chemical-mechanical planarization" : 2003 MRS spring meeting : Apr 2003, San Francisco, CA.
Series Title: Materials Research Society Symposia Proceedings ; 767
Title Heading: Materials Research Society symposia proceedings. v. 767.
Author Heading: Boning, Duane S.
Materials Research Society. Meeting (2003 : San Francisco, Calif.)
Symposium on Chemical-Mechanical Planarization (2003 : San Francisco, Calif.)
Publication, Distribution, etc.: Warrendale : Materials Research Society
Publication Date: c2003.
Publication Date (W3CDTF): 2003
Extent: xi, 348 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Microelectronics -- Materials -- Congresses.
Grinding and polishing -- Congresses.
Metals -- Pickling -- Congresses.
Semiconductors -- Surfaces -- Congresses.
NDLC: M17
Note (General): Papers.
" (...) the sixth in an annual series of CMP symposia associated with the MRS Spring Meeting." -- preface.
Note (Bibliography): Includes bibliographic references and indexes.
Holding library: 国立国会図書館
Call No.: M17-04-1776
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004270636
http://id.ndl.go.jp/bib/000004270636
RLIN No.: MOHG53191183-B
Bibliographic Record Category (NDL): 215