Characterization and metrology for ULSI technology : 2003 international conference on characterization and metrology for ULSI technology : Austin, Texas 24-28 March 2003. : Mar 2003, Austin, TX. (AIP Conference Proceedings ; 683)

Characterization and metrology for ULSI technology : 2003 international conference on characterization and metrology for ULSI technology : Austin, Texas 24-28 March 2003. : Mar 2003, Austin, TX.

(AIP Conference Proceedings ; 683)

Call No. (NDL): M17-04-1460
Bibliographic ID of National Diet Library: 000004300052

Material type: 図書

Author: Seiler, David G.ほか

Publisher: American Institute of Physics

Publication date: c2003.

Material Format: Paper

Capacity, size, etc.: xviii, 818 p. : ill. ; 28 cm.

NDC: -

View All

Notes on use

Note (General)：: Papers.Accompanying computer disc contains full text from the book.

Accompanying material：: With a CD-ROM.

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 図書
ISBN (set): 0735401527 (set)
ISSN (series): 0094-243X
Title: Characterization and metrology for ULSI technology : 2003 international conference on characterization and metrology for ULSI technology : Austin, Texas 24-28 March 2003. : Mar 2003, Austin, TX.
Series Title: AIP Conference Proceedings ; 683
Title Heading: AIP conference proceedings ; no. 683.
Author Heading: Seiler, David G.
International Conference on Characterization and Metrology for ULSI Technology (2003 : Austin, Tex.)
Publication, Distribution, etc.: Melville : American Institute of Physics
Publication Date: c2003.
Publication Date (W3CDTF): 2003
Extent: xviii, 818 p. : ill. ; 28 cm.
Accompanying material: With a CD-ROM.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits -- Ultra large scale integration -- Congresses.
Integrated circuits -- Ultra large scale integration -- Congresses -- Software.
NDLC: M17
Note (General): Papers.
Accompanying computer disc contains full text from the book.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-04-1460
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004300052
http://id.ndl.go.jp/bib/000004300052
RLIN No.: CSUGA5558346-B
Bibliographic Record Category (NDL): 215