Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003 : San Diego, California, USA. : 48th annual meeting of SPIE's international symposium on optical science and technology : Aug 2003, San Diego, CA. (SPIE Proceedings ; 5193)

Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003 : San Diego, California, USA. : 48th annual meeting of SPIE's international symposium on optical science and technology : Aug 2003, San Diego, CA.

(SPIE Proceedings ; 5193)

Call No. (NDL): M17-04-1864
Bibliographic ID of National Diet Library: 000004364260

Material type: 図書

Author: Khounsary, Ali M.ほか

Publisher: SPIE

Publication date: c2004.

Material Format: Paper

Capacity, size, etc.: ix, 222 p. : ill. (some color) ; 28 cm.

NDC: -

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Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN: 0819450669
ISSN (series): 0277-786X
Title: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003 : San Diego, California, USA. : 48th annual meeting of SPIE's international symposium on optical science and technology : Aug 2003, San Diego, CA.
Series Title: SPIE Proceedings ; 5193
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering. v. 5198.
Author Heading: Khounsary, Ali M.
Dinger, Udo.
Ota, Kazuya.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2004.
Publication Date (W3CDTF): 2004
Extent: ix, 222 p. : ill. (some color) ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Mirrors -- Design and construction -- Congresses.
Lasers -- Mirrors -- Design and construction -- Congresses.
Optical coatings -- Congresses.
Optical radiometry -- Congresses.
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographic references and author index.
Holding library: 国立国会図書館
Call No.: M17-04-1864
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004364260
http://id.ndl.go.jp/bib/000004364260
RLIN No.: MOHG54354588-B
Bibliographic Record Category (NDL): 215