Monitoring PVD metal vapors using laser absorption spectroscopy UCRL-JC-116205 DE94 018455 CONF-94051394

Monitoring PVD metal vapors using laser absorption spectroscopy

UCRL-JC-116205 DE94 018455 CONF-94051394

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Material Type: 規格・テクニカルリポート類
Title: Monitoring PVD metal vapors using laser absorption spectroscopy
Author/Editor: Braun, D. G
Anklam, T. M
Berzins, L. V
Hagans, K. G
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-116205
テクニカルリポート番号 : DE94 018455
テクニカルリポート番号 : CONF-94051394
Holding library: 国立国会図書館
Call No.: LS-DE94/018455
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005500231
http://id.ndl.go.jp/bib/000005500231
Bibliographic Record Category (NDL): 291