規格・テクニカルリポート類

Specification of the figure and finish of EUV mirrors in terms of performance requirements BNL-60902 DE95 002927 CONF-94091774

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Specification of the figure and finish of EUV mirrors in terms of performance requirements

BNL-60902 DE95 002927 CONF-94091774

Call No. (NDL)
LS-DE95/002927
Bibliographic ID of National Diet Library
000005509326
Material type
規格・テクニカルリポート類
Author
Church, E. Lほか
Publisher
-
Publication date
1994
Material Format
Microform
Capacity, size, etc.
6 p. (1 microfiche)
NDC
-
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Microform

Material Type
規格・テクニカルリポート類
Author/Editor
Church, E. L
Takacs, P. Z
Publication Date
1994
Publication Date (W3CDTF)
1994
Extent
6 p. (1 microfiche)
Note (Material Type)
[microform]
Report No.
テクニカルリポート番号 : BNL-60902
テクニカルリポート番号 : DE95 002927
テクニカルリポート番号 : CONF-94091774
Holding library
国立国会図書館
Call No.
LS-DE95/002927