Control of thin film processing behavior through precursor structural modifications SAND-95-0090C DE95 006468 CONF-9501292

Control of thin film processing behavior through precursor structural modifications

SAND-95-0090C DE95 006468 CONF-9501292

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Material Type: 規格・テクニカルリポート類
Title: Control of thin film processing behavior through precursor structural modifications
Author/Editor: Schwartz, R. W
Voigt, J. A
Boyle, T. J
Christenson, T. A
Buchheit, C. D
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 15 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-0090C
テクニカルリポート番号 : DE95 006468
テクニカルリポート番号 : CONF-9501292
Holding library: 国立国会図書館
Call No.: LS-DE95/006468
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005517195
http://id.ndl.go.jp/bib/000005517195
Bibliographic Record Category (NDL): 291