Multivariate classification of BPSG thin films using Mahalanobis distances SAND-95-0394C DE95 008519 CONF-95051921

Multivariate classification of BPSG thin films using Mahalanobis distances

SAND-95-0394C DE95 008519 CONF-95051921

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Material Type: 規格・テクニカルリポート類
Title: Multivariate classification of BPSG thin films using Mahalanobis distances
Author/Editor: Zhang, S
Franke, J. E
Niemczyk, T. M
Haaland, D. M
Cox, J. N
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-0394C
テクニカルリポート番号 : DE95 008519
テクニカルリポート番号 : CONF-95051921
Holding library: 国立国会図書館
Call No.: LS-DE95/008519
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005517937
http://id.ndl.go.jp/bib/000005517937
Bibliographic Record Category (NDL): 291