Numerical study of the effects of reactor geometry on a chlorine helicon plasma etch reactor AIAA-96-0591

Numerical study of the effects of reactor geometry on a chlorine helicon plasma etch reactor

AIAA-96-0591

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Material Type: 規格・テクニカルリポート類
Title: Numerical study of the effects of reactor geometry on a chlorine helicon plasma etch reactor
Author/Editor: Font, Gabriel I
Boyd, Iain D
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 9 p
Alternative Title: Aerospace sciences meeting & exhibit. 34th. Reno, Nev. Jan. 1996
Report No.: テクニカルリポート番号 : AIAA-96-0591
Holding library: 国立国会図書館
Call No.: M-AIAA-96-0591
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005534954
http://id.ndl.go.jp/bib/000005534954
Bibliographic Record Category (NDL): 291