Fifth workshop on the role of impurities and defects in silicon device processing. Extended abstracts NREL/SP-413-8250 DE95 009278 CONF-9508143-EXTDABSTS

Fifth workshop on the role of impurities and defects in silicon device processing. Extended abstracts

NREL/SP-413-8250 DE95 009278 CONF-9508143-EXTDABSTS

Call No. (NDL): LS-DE95/009278
Bibliographic ID of National Diet Library: 000005536169

Material type: 規格・テクニカルリポート類

Author: Sopori, B. Lほか

Publisher: -

Publication date: 1995

Material Format: Microform

Capacity, size, etc.: 160 p. (2 microfiches)

NDC: -

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Microform

Material Type: 規格・テクニカルリポート類
Title: Fifth workshop on the role of impurities and defects in silicon device processing. Extended abstracts
Author/Editor: Sopori, B. L
Luque, A
Sopori, B
Swanson, D
Gee, J
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 160 p. (2 microfiches)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : NREL/SP-413-8250
テクニカルリポート番号 : DE95 009278
テクニカルリポート番号 : CONF-9508143-EXTDABSTS
Holding library: 国立国会図書館
Call No.: LS-DE95/009278
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005536169
http://id.ndl.go.jp/bib/000005536169
Bibliographic Record Category (NDL): 291