Evaporation rate and composition monitoring of electron beam PVD processes UCRL-JC-118759 DE95 015423 CONF-9504548

Evaporation rate and composition monitoring of electron beam PVD processes

UCRL-JC-118759 DE95 015423 CONF-9504548

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Material Type: 規格・テクニカルリポート類
Title: Evaporation rate and composition monitoring of electron beam PVD processes
Author/Editor: Anklam, T. M
Berzins, L. V
Braun, D. G
Haynam, C
Meier, T
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 18 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-118759
テクニカルリポート番号 : DE95 015423
テクニカルリポート番号 : CONF-9504548
Holding library: 国立国会図書館
Call No.: LS-DE95/015423
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005536743
http://id.ndl.go.jp/bib/000005536743
Bibliographic Record Category (NDL): 291