EUV reticle pattern repair experiments using 10 KeV neon ions UCRL-JC-119625 DE95 014692 CONF-940917710

EUV reticle pattern repair experiments using 10 KeV neon ions

UCRL-JC-119625 DE95 014692 CONF-940917710

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Material Type: 規格・テクニカルリポート類
Title: EUV reticle pattern repair experiments using 10 KeV neon ions
Author/Editor: Hawryluk, A. M
Kania, D. R
Celliers, P
DaSilva, L
Stith, A
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-119625
テクニカルリポート番号 : DE95 014692
テクニカルリポート番号 : CONF-940917710
Holding library: 国立国会図書館
Call No.: LS-DE95/014692
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005537960
http://id.ndl.go.jp/bib/000005537960
Bibliographic Record Category (NDL): 291