ECR etching of group-III nitride binary and ternary films SAND-95-2101C DE96 000782 CONF-9510074

ECR etching of group-III nitride binary and ternary films

SAND-95-2101C DE96 000782 CONF-9510074

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Material Type: 規格・テクニカルリポート類
Title: ECR etching of group-III nitride binary and ternary films
Author/Editor: Shul, R. J
Howard, A. J
Pearton, S. J
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 14 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-2101C
テクニカルリポート番号 : DE96 000782
テクニカルリポート番号 : CONF-9510074
Holding library: 国立国会図書館
Call No.: LS-DE96/000782
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005539375
http://id.ndl.go.jp/bib/000005539375
Bibliographic Record Category (NDL): 291