Growth and properties of W-B-N diffusion barriers deposited by chemical vapor deposition SAND-95-2250C DE96 001726 CONF-95101611

Growth and properties of W-B-N diffusion barriers deposited by chemical vapor deposition

SAND-95-2250C DE96 001726 CONF-95101611

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Material Type: 規格・テクニカルリポート類
Title: Growth and properties of W-B-N diffusion barriers deposited by chemical vapor deposition
Author/Editor: Fleming, J. G
Roherty-Osmun, E
Custer, J
Smith, P. M
Reid, J. S
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 5 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-2250C
テクニカルリポート番号 : DE96 001726
テクニカルリポート番号 : CONF-95101611
Holding library: 国立国会図書館
Call No.: LS-DE96/001726
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005541727
http://id.ndl.go.jp/bib/000005541727
Bibliographic Record Category (NDL): 291