Fifth workshop on the role of impurities and defects in silicon device processing: Summary of panel discussions NREL/TP-413-20005 DE95 009298 CONF-9508143-SUMM

Fifth workshop on the role of impurities and defects in silicon device processing: Summary of panel discussions

NREL/TP-413-20005 DE95 009298 CONF-9508143-SUMM

Call No. (NDL): LS-DE95/009298
Bibliographic ID of National Diet Library: 000005544464

Material type: 規格・テクニカルリポート類

Author: Tan, Tほか

Publisher: -

Publication date: 1995

Material Format: Microform

Capacity, size, etc.: 15 p. (1 microfiche)

NDC: -

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Microform

Material Type: 規格・テクニカルリポート類
Title: Fifth workshop on the role of impurities and defects in silicon device processing: Summary of panel discussions
Author/Editor: Tan, T
Sopori, B
Estreicher, S
Jastrzebski, L
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 15 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : NREL/TP-413-20005
テクニカルリポート番号 : DE95 009298
テクニカルリポート番号 : CONF-9508143-SUMM
Holding library: 国立国会図書館
Call No.: LS-DE95/009298
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005544464
http://id.ndl.go.jp/bib/000005544464
Bibliographic Record Category (NDL): 291