Quartz substrates for EUVL reticles UCRL-JC-119907 DE96 004654 CONF-940917717

Quartz substrates for EUVL reticles

UCRL-JC-119907 DE96 004654 CONF-940917717

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Material Type: 規格・テクニカルリポート類
Title: Quartz substrates for EUVL reticles
Author/Editor: Kania, D. R
Weber, F. J
Vernon, S. P
Hawryluk, A
Baker, S. L
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-119907
テクニカルリポート番号 : DE96 004654
テクニカルリポート番号 : CONF-940917717
Holding library: 国立国会図書館
Call No.: LS-DE96/004654
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005546944
http://id.ndl.go.jp/bib/000005546944
Bibliographic Record Category (NDL): 291