Energetic ion beams in semiconductor processing: Summary of a DOE panel study SAND-95-1453C DE96 006978 CONF-95115584-SUMM

Energetic ion beams in semiconductor processing: Summary of a DOE panel study

SAND-95-1453C DE96 006978 CONF-95115584-SUMM

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Material Type: 規格・テクニカルリポート類
Title: Energetic ion beams in semiconductor processing: Summary of a DOE panel study
Author/Editor: Picraux, S. T
Cchason, E
Poate, J. M
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 10 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-1453C
テクニカルリポート番号 : DE96 006978
テクニカルリポート番号 : CONF-95115584-SUMM
Holding library: 国立国会図書館
Call No.: LS-DE96/006978
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005560380
http://id.ndl.go.jp/bib/000005560380
Bibliographic Record Category (NDL): 291