Vapor deposition of tantalum and tantalum compounds LA-UR-96-825 DE96 008159 CONF-96020213

Vapor deposition of tantalum and tantalum compounds

LA-UR-96-825 DE96 008159 CONF-96020213

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Material Type: 規格・テクニカルリポート類
Title: Vapor deposition of tantalum and tantalum compounds
Author/Editor: Trkula, M
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 12 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LA-UR-96-825
テクニカルリポート番号 : DE96 008159
テクニカルリポート番号 : CONF-96020213
Holding library: 国立国会図書館
Call No.: LS-DE96/008159
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005775066
http://id.ndl.go.jp/bib/000005775066
Bibliographic Record Category (NDL): 291