High microwave power ECR etching of III-V semiconductors in CH4/H2/Ar SAND-96-0693C DE96 007053 CONF-9605024

High microwave power ECR etching of III-V semiconductors in CH4/H2/Ar

SAND-96-0693C DE96 007053 CONF-9605024

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Material Type: 規格・テクニカルリポート類
Title: High microwave power ECR etching of III-V semiconductors in CH4/H2/Ar
Author/Editor: Lee, J. W
Pearton, S. J
Lambers, E. S
Mileham, J. R
Abernathy, C. R
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 11 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0693C
テクニカルリポート番号 : DE96 007053
テクニカルリポート番号 : CONF-9605024
Holding library: 国立国会図書館
Call No.: LS-DE96/007053
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005775802
http://id.ndl.go.jp/bib/000005775802
Bibliographic Record Category (NDL): 291