Ion energy and angular distributions in inductively coupled Argon RF discharges SAND-96-0535 DE96 009170

Ion energy and angular distributions in inductively coupled Argon RF discharges

SAND-96-0535 DE96 009170

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Material Type: 規格・テクニカルリポート類
Title: Ion energy and angular distributions in inductively coupled Argon RF discharges
Author/Editor: Woodworth, J. R
Riley, M. E
Meister, D. C
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 53 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0535
テクニカルリポート番号 : DE96 009170
Holding library: 国立国会図書館
Call No.: LS-DE96/009170
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005775902
http://id.ndl.go.jp/bib/000005775902
Bibliographic Record Category (NDL): 291