ECR etching of GaP, GaAs, InP, and InGaAs in Cl(sub 2)/Ar, Cl(sub 2)/N(sub 2), BCl(sub 3)/Ar, and BCl(sub 3)/N(sub 2) SAND-96-1143C DE96 010521 CONF-96040139

ECR etching of GaP, GaAs, InP, and InGaAs in Cl(sub 2)/Ar, Cl(sub 2)/N(sub 2), BCl(sub 3)/Ar, and BCl(sub 3)/N(sub 2)

SAND-96-1143C DE96 010521 CONF-96040139

Call No. (NDL): LS-DE96/010521
Bibliographic ID of National Diet Library: 000005856020

Material type: 規格・テクニカルリポート類

Author: Shul, R. Jほか

Publisher: -

Publication date: 1996

Material Format: Microform

Capacity, size, etc.: 6 p. (1 microfiche)

NDC: -

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Material Type: 規格・テクニカルリポート類
Title: ECR etching of GaP, GaAs, InP, and InGaAs in Cl(sub 2)/Ar, Cl(sub 2)/N(sub 2), BCl(sub 3)/Ar, and BCl(sub 3)/N(sub 2)
Author/Editor: Shul, R. J
Baca, A. G
Rieger, D. J
Hou, H
Pearton, S. J
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-1143C
テクニカルリポート番号 : DE96 010521
テクニカルリポート番号 : CONF-96040139
Holding library: 国立国会図書館
Call No.: LS-DE96/010521
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005856020
http://id.ndl.go.jp/bib/000005856020
Bibliographic Record Category (NDL): 291