Gettering of transition metals by cavities in silicon formed by helium ion implantation SAND-96-0869C DE96 015014 CONF-9609941

Gettering of transition metals by cavities in silicon formed by helium ion implantation

SAND-96-0869C DE96 015014 CONF-9609941

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Material Type: 規格・テクニカルリポート類
Title: Gettering of transition metals by cavities in silicon formed by helium ion implantation
Author/Editor: Petersen, G. A
Myers, S. M
Follstaedt, D. M
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 15 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0869C
テクニカルリポート番号 : DE96 015014
テクニカルリポート番号 : CONF-9609941
Holding library: 国立国会図書館
Call No.: LS-DE96/015014
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005859294
http://id.ndl.go.jp/bib/000005859294
Bibliographic Record Category (NDL): 291