ICP etching of GaAs via hole contacts SAND-96-1901C DE96 013184 CONF-9610401

ICP etching of GaAs via hole contacts

SAND-96-1901C DE96 013184 CONF-9610401

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Material Type: 規格・テクニカルリポート類
Title: ICP etching of GaAs via hole contacts
Author/Editor: Shul, R. J
Baca, A. G
Briggs, R. D
McClellan, G. B
Pearton, S. J
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 9 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-1901C
テクニカルリポート番号 : DE96 013184
テクニカルリポート番号 : CONF-9610401
Holding library: 国立国会図書館
Call No.: LS-DE96/013184
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005860115
http://id.ndl.go.jp/bib/000005860115
Bibliographic Record Category (NDL): 291