Particle-surface interactions in chemical mechanical polishing SAND-96-2328C DE96 015194 CONF-96091072

Particle-surface interactions in chemical mechanical polishing

SAND-96-2328C DE96 015194 CONF-96091072

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Material Type: 規格・テクニカルリポート類
Title: Particle-surface interactions in chemical mechanical polishing
Author/Editor: Dugger, M. T
Adkins, C. L. J
Resnick, P. J
Jeon, J. S
Raghavan, S
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-2328C
テクニカルリポート番号 : DE96 015194
テクニカルリポート番号 : CONF-96091072
Holding library: 国立国会図書館
Call No.: LS-DE96/015194
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005860144
http://id.ndl.go.jp/bib/000005860144
Bibliographic Record Category (NDL): 291