Dynamics of electronegative plasmas for materials processing. Final report. PROGRESS REPT DOE/ER/13727-T3 DE97 002898

Dynamics of electronegative plasmas for materials processing. Final report. PROGRESS REPT

DOE/ER/13727-T3 DE97 002898

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Material Type: 規格・テクニカルリポート類
Title: Dynamics of electronegative plasmas for materials processing. Final report. PROGRESS REPT
Author/Editor: Lichtenberg, A. J
Lieberman, M. A
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 10 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : DOE/ER/13727-T3
テクニカルリポート番号 : DE97 002898
Holding library: 国立国会図書館
Call No.: LS-DE97/002898
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005866847
http://id.ndl.go.jp/bib/000005866847
Bibliographic Record Category (NDL): 291