Optical measurement of LIGA milliengine performance SAND-97-3180C DE98 001732 CONF-980117

Optical measurement of LIGA milliengine performance

SAND-97-3180C DE98 001732 CONF-980117

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Material Type: 規格・テクニカルリポート類
Title: Optical measurement of LIGA milliengine performance
Author/Editor: Dickey, F. M
Holswade, S. C
Christenson, T. R
Garcia, E. J
Polosky, M. A
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 9 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-97-3180C
テクニカルリポート番号 : DE98 001732
テクニカルリポート番号 : CONF-980117
Holding library: 国立国会図書館
Call No.: LS-DE98/001732
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005877874
http://id.ndl.go.jp/bib/000005877874
Bibliographic Record Category (NDL): 291