Deposition uniformity, particle nucleation and the optimum conditions for CVD in multi-wafer furnaces SAND-96-8614 DE97 053036

Deposition uniformity, particle nucleation and the optimum conditions for CVD in multi-wafer furnaces

SAND-96-8614 DE97 053036

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 規格・テクニカルリポート類
Title: Deposition uniformity, particle nucleation and the optimum conditions for CVD in multi-wafer furnaces
Author/Editor: Griffiths, S. K
Nilson, R. H
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 21 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-8614
テクニカルリポート番号 : DE97 053036
Holding library: 国立国会図書館
Call No.: LS-DE97/053036
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005878892
http://id.ndl.go.jp/bib/000005878892
Bibliographic Record Category (NDL): 291