Multilayer coating and tests of a 10x extreme ultraviolet lithographc camera UCRLJC128291 DE98 057751 CONF980225

Multilayer coating and tests of a 10x extreme ultraviolet lithographc camera

UCRLJC128291 DE98 057751 CONF980225

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 規格・テクニカルリポート類
Title: Multilayer coating and tests of a 10x extreme ultraviolet lithographc camera
Author/Editor: Spiller, E
Weber, F. J
Montcalm, C
Baker, S. L
Gullikson, E. M
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 13 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRLJC128291
テクニカルリポート番号 : DE98 057751
テクニカルリポート番号 : CONF980225
Holding library: 国立国会図書館
Call No.: LS-DE98/057751
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005893971
http://id.ndl.go.jp/bib/000005893971
Bibliographic Record Category (NDL): 291