Alternative micromachining approaches for the realization of robust MEMS AIAA-2000-0248

Alternative micromachining approaches for the realization of robust MEMS

AIAA-2000-0248

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Material Type: 規格・テクニカルリポート類
Title: Alternative micromachining approaches for the realization of robust MEMS
Author/Editor: Allen, Mark G
Glezer, Ari
Publication Date: 2000
Publication Date (W3CDTF): 2000
Extent: 14 p
Alternative Title: Aerospace sciences meeting & exhibit. 38th. Reno, Nev. Jan. 2000
Report No.: テクニカルリポート番号 : AIAA-2000-0248
Holding library: 国立国会図書館
Call No.: M-AIAA-2000-0248
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006063440
http://id.ndl.go.jp/bib/000006063440
Bibliographic Record Category (NDL): 291