Design and fabrication of monolithically integrated pressure and temperature sensor using MEMS processes for wide band gap materials AIAA-2001-4649

Design and fabrication of monolithically integrated pressure and temperature sensor using MEMS processes for wide band gap materials

AIAA-2001-4649

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Material Type: 規格・テクニカルリポート類
Title: Design and fabrication of monolithically integrated pressure and temperature sensor using MEMS processes for wide band gap materials
Author/Editor: Dasgupta, S
Scofield, J. S
Boyd, J. T
Publication Date: 2001
Publication Date (W3CDTF): 2001
Extent: 9 p
Report No.: テクニカルリポート番号 : AIAA-2001-4649
Holding library: 国立国会図書館
Call No.: M-AIAA-2001-4649
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006097385
http://id.ndl.go.jp/bib/000006097385
Bibliographic Record Category (NDL): 291