The results of an interlaboratory study of ellipsometric measurements of thin film silicon dioxide on silicon [microform] / Barbara J. Belzer and David L. Blackburn (Semiconductor measurement technology) (NIST special publication ; 400-99)

The results of an interlaboratory study of ellipsometric measurements of thin film silicon dioxide on silicon [microform] / Barbara J. Belzer and David L. Blackburn

(Semiconductor measurement technology) (NIST special publication ; 400-99)

Call No. (NDL): YCA-C 13.10:400-99
Bibliographic ID of National Diet Library: 000006613283

Material type: 図書

Author: Belzer, Barbara Jほか

Publisher: -

Publication date: 1997

Material Format: Microform

Capacity, size, etc.: microfiche ; 11 × 15 cm

NDC: -

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Notes on use

Note (General)：: Shipping list no.: 98-0569-MPaper version no longer for sale by the Supt. of Docs"May 1997."...

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Material Type: 図書
Title: The results of an interlaboratory study of ellipsometric measurements of thin film silicon dioxide on silicon [microform] / Barbara J. Belzer and David L. Blackburn
Series Title: Semiconductor measurement technology
NIST special publication ; 400-99
Author Heading: Belzer, Barbara J
Blackburn, David L
National Institute of Standards and Technology (U.S.)
Publication Date (W3CDTF): 1997
Extent: microfiche
Size: 11 × 15 cm
Alternative Title: Results of an interlaboratory study of ellipsometric measurements of thin film silicon dioxide on silicon
Place of Publication (Country Code): US
Text Language Code: eng
Note (Material Type): [microform]
Subject Heading: Silica -- United States
Ellipsometry
Note (General): Shipping list no.: 98-0569-M
Paper version no longer for sale by the Supt. of Docs
"May 1997."
Physical description for original version: iv, 25 p. : 28 cm
Note (Bibliography): Includes bibliographical references (p. 6)
Note (Original Version): 原資料の出版事項: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1997
SUPTDOC番号: C 13.10: 400-99
GPO管理番号: 0247 (MF)
Holding library: 国立国会図書館
Call No.: YCA-C 13.10:400-99
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006613283
http://id.ndl.go.jp/bib/000006613283
OCLC No.: 39244575
https://www.worldcat.org/oclc/39244575
Bibliographic Record Category (NDL): 281