Cleaning technology in semiconductor device manufacturing 8 : proceedings of the international symposium. : 8th international symposium on cleaning technology in semiconductor device manufacturing : fall meeting of the Electrochemical Society : ECS cleaning symposium : Oct 2003, Orlando, FL. (PV ; 2003-26)

Cleaning technology in semiconductor device manufacturing 8 : proceedings of the international symposium. : 8th international symposium on cleaning technology in semiconductor device manufacturing : fall meeting of the Electrochemical Society : ECS cleaning symposium : Oct 2003, Orlando, FL.

(PV ; 2003-26)

Call No. (NDL): M17-04-2362
Bibliographic ID of National Diet Library: 000007377785

Material type: 図書

Author: Rużyłło, Jerzy.ほか

Publisher: Electrochemical Society

Publication date: c2004.

Material Format: Paper

Capacity, size, etc.: xi, 436 p. : ill. ; 24 cm.

NDC: -

Notes on use

Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN: 156677411X
Title: Cleaning technology in semiconductor device manufacturing 8 : proceedings of the international symposium. : 8th international symposium on cleaning technology in semiconductor device manufacturing : fall meeting of the Electrochemical Society : ECS cleaning symposium : Oct 2003, Orlando, FL.
Series Title: PV ; 2003-26
Title Heading: Proceedings (Electrochemical Society) v. 2003-26.
Author Heading: Rużyłło, Jerzy.
Electrochemical Society. Meeting (2003 : Orlando, Fla.)
International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (8th : 2003 : Orlando, Florida)
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2004.
Publication Date (W3CDTF): 2004
Extent: xi, 436 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductor wafers -- Cleaning -- Congresses.
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographic references and indexes.
Holding library: 国立国会図書館
Call No.: M17-04-2362
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007377785
http://id.ndl.go.jp/bib/000007377785
LC Control Number: 2004101827
https://lccn.loc.gov/2004101827
RLIN No.: MOHG54975621-B
Bibliographic Record Category (NDL): 215