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図書

Cleaning technology in semiconductor device manufacturing 8 : proceedings of the international symposium. : 8th international symposium on cleaning technology in semiconductor device manufacturing : fall meeting of the Electrochemical Society : ECS cleaning symposium : Oct 2003, Orlando, FL. (PV ; 2003-26)

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Cleaning technology in semiconductor device manufacturing 8 : proceedings of the international symposium. : 8th international symposium on cleaning technology in semiconductor device manufacturing : fall meeting of the Electrochemical Society : ECS cleaning symposium : Oct 2003, Orlando, FL.

(PV ; 2003-26)

Call No. (NDL)
M17-04-2362
Bibliographic ID of National Diet Library
000007377785
Material type
図書
Author
Rużyłło, Jerzy.ほか
Publisher
Electrochemical Society
Publication date
c2004.
Material Format
Paper
Capacity, size, etc.
xi, 436 p. : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
156677411X
Title
Cleaning technology in semiconductor device manufacturing 8 : proceedings of the international symposium. : 8th international symposium on cleaning technology in semiconductor device manufacturing : fall meeting of the Electrochemical Society : ECS cleaning symposium : Oct 2003, Orlando, FL.
Series Title
PV ; 2003-26
Title Heading
Proceedings (Electrochemical Society) v. 2003-26.
Author Heading
Rużyłło, Jerzy.
Electrochemical Society. Meeting (2003 : Orlando, Fla.)
International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (8th : 2003 : Orlando, Florida)
Publication, Distribution, etc.
Pennington : Electrochemical Society
Publication Date
c2004.
Publication Date (W3CDTF)
2004
Extent
xi, 436 p. : ill. ; 24 cm.