Studies on effect of excitation frequency on neutral radicals in very high frequency capacitively coupled plasma

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Material Type: 博士論文
Title: Studies on effect of excitation frequency on neutral radicals in very high frequency capacitively coupled plasma
Author/Editor: Takayuki Ohta [著]
Author Heading: 太田, 貴之オオタ, タカユキ
Publication, Distribution, etc.: [Takayuki Ohta]
Publication Date: 2004
Publication Date (W3CDTF): 2004
Extent: 1冊
Alternative Title: VHF容量結合プラズマ中の中性ラジカルにおける励起周波数の効果に関する研究 VHF ヨウリョウケツゴウプラズマチュウノチュウセイラジカルニオケルレイキシュウハスウノコウカニカンスルケンキュウ
Degree grantor/type: 名古屋大学
Date Granted: 平成16年3月25日
Date Granted (W3CDTF): 2004
Dissertation Number: 甲第6268号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2004-E814
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007425273
http://id.ndl.go.jp/bib/000007425273
Bibliographic Record Category (NDL): 213