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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- シリコン ネツ サンカ ノ カイメンソ カテイ ニ カンスル リロンテキ ケンキュウ
- Author/Editor
- 白石賢二, 筑波大学 [著]
- Publication, Distribution, etc.
- Publication Date
- 2002-20032004.5
- Publication Date (W3CDTF)
- 20022003
- Extent
- 1冊
- Alternative Title
- Theoretical studies on the basic processes of Si thermal oxydation