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図書

レーザーマイクロ・ナノプロセッシング

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レーザーマイクロ・ナノプロセッシング

Call No. (NDL)
ND451-H16
Bibliographic ID of National Diet Library
000007592239
Material type
図書
Author
杉岡幸次, 矢部明 監修
Publisher
シーエムシー出版
Publication date
2004.11
Material Format
Paper
Capacity, size, etc.
386p ; 27cm
NDC
549.95
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Table of Contents

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  • 目次

  • 第I編 レーザープロセッシング序論/ 1

    矢部明||杉岡幸次

  • 1 レーザー装置の開発/ 1

  • 2 レーザープロセッシングの経過/ 4

  • 3 マイクロ・ナノテクノロジーに向けたレーザープロセッシング/ 9

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Paper

Material Type
図書
ISBN
4-88231-476-2
Title Transcription
レーザー マイクロ ナノ プロセッシング
Author/Editor
杉岡幸次, 矢部明 監修
Author Heading
杉岡, 幸次 スギオカ, コウジ ( 00980071 )Authorities
矢部, 明, 1941- ヤベ, アキラ, 1941- ( 00187688 )Authorities
Publication, Distribution, etc.
Publication Date
2004.11
Publication Date (W3CDTF)
2004
Extent
386p