Studies on development of microwave excited non-equilibrium atmospheric pressure plasma source and its application to material processing

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Material Type: 博士論文
Title: Studies on development of microwave excited non-equilibrium atmospheric pressure plasma source and its application to material processing
Author/Editor: Koji Yamakawa [著]
Author Heading: 山川, 晃司ヤマカワ, コウジ
Publication, Distribution, etc.: [Koji Yamakawa]
Publication Date: 2005
Publication Date (W3CDTF): 2005
Extent: 1冊
Alternative Title: マイクロ波励起非平衡大気圧プラズマ源の開発と材料プロセスへの応用に関する研究マイクロハレイキヒヘイコウタイキアツプラズマゲンノカイハツトザイリョウプロセスエノオウヨウニカンスルケンキュウ
Degree grantor/type: 名古屋大学
Date Granted: 平成17年3月25日
Date Granted (W3CDTF): 2005
Dissertation Number: 甲第6671号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2005-D866
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007826703
http://id.ndl.go.jp/bib/000007826703
Bibliographic Record Category (NDL): 213