博士論文

Investigation on fracture behaviors of single crystal silicon films

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Investigation on fracture behaviors of single crystal silicon films

Call No. (NDL)
UT51-2005-D870
Bibliographic ID of National Diet Library
000007826870
Material type
博士論文
Author
Xueping Li [著]
Publisher
[Xueping Li]
Publication date
2005
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
名古屋大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Xueping Li [著]
Author Heading
李, 雪萍 リ, セツヘイ
Publication, Distribution, etc.
Publication Date
2005
Publication Date (W3CDTF)
2005
Extent
1冊
Alternative Title
単結晶シリコン薄膜の破壊挙動に関する研究 タンケッショウ シリコン ハクマク ノ ハカイ キョドウ ニ カンスル ケンキュウ
Degree grantor/type
名古屋大学