Search by Bookstore
Search by Bookstore
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 博士論文
- Title Transcription
- 90nm タイオウ コウコウリツ フォトリソグラフィ ギジュツ ノ カイハツ ト ジツヨウカ
- Author/Editor
- 加藤毅 [著]
- Author Heading
- 加藤, 毅 カトウ, タケシ
- Publication, Distribution, etc.
- Publication Date
- [2005]
- Publication Date (W3CDTF)
- 2005
- Extent
- 1冊
- Degree grantor/type
- 東北大学