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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- テイエネルギー イオン ショウシャ ニ ヨル ハクマク ノ カイシツ ト ヒョウカ ニ カンスル ケンキュウ
- Author/Editor
- 佐々木智憲 [著]
- Author Heading
- 佐々木, 智憲 ササキ, トモノリ
- Publication, Distribution, etc.
- Publication Date
- 2005
- Publication Date (W3CDTF)
- 2005
- Extent
- 1冊
- Alternative Title
- Improvement of the mechanical properties of metal thin films using very low energy argon ion irradiation and the development of its evaluation method