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図書

Micromachining and microfabrication process technology 11 : 25 January 2006 : San Jose, California, USA. : Jan 2006, San Jose, CA. (SPIE Proceedings ; 6109)

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Micromachining and microfabrication process technology 11 : 25 January 2006 : San Jose, California, USA. : Jan 2006, San Jose, CA.

(SPIE Proceedings ; 6109)

Call No. (NDL)
M17-06-1214
Bibliographic ID of National Diet Library
000008168241
Material type
図書
Author
Perez-Maher, Mary Ann.ほか
Publisher
SPIE
Publication date
c2006.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) : ill. ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0819461512
ISSN (series)
0277-786X
Title
Micromachining and microfabrication process technology 11 : 25 January 2006 : San Jose, California, USA. : Jan 2006, San Jose, CA.
Series Title
SPIE Proceedings ; 6109
Title Heading
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6109.
Author Heading
Perez-Maher, Mary Ann.
Stewart, Harold D.
Chiao, Jung-Chih.
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2006.
Publication Date (W3CDTF)
2006