Novel fabrication processes for semiconductor devices and electronic components by using subcritical water and supercritical carbon dioxide

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Material Type: 博士論文
Title: Novel fabrication processes for semiconductor devices and electronic components by using subcritical water and supercritical carbon dioxide
Author/Editor: Kiyoyuki Morita [著]
Author Heading: 森田, 清之モリタ, キヨユキ
Publication, Distribution, etc.: [Kiyoyuki Morita]
Publication Date: 2006
Publication Date (W3CDTF): 2006
Extent: 1冊
Alternative Title: 亜臨界水や超臨界二酸化炭素を用いた新規半導体デバイス・電子部品製造プロセスの研究アリンカイスイヤチョウリンカイニサンカタンソオモチイタシンキハンドウタイデバイスデンシブヒンセイゾウプロセスノケンキュウ
Degree grantor/type: 大阪大学
Date Granted: 平成18年3月24日
Date Granted (W3CDTF): 2006
Dissertation Number: 甲第11237号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2006-F217
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000008215248
http://id.ndl.go.jp/bib/000008215248
Bibliographic Record Category (NDL): 213