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Table of Contents
目次
第1章 無機膜の製造プロセス
1 PVD法/ 2
1.1 真空蒸着法/ 2
1.1.1 薄膜形成の素過程と真空の関係/ 3
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- Material Type
- 図書
- ISBN
- 4-88231-569-6
- Title
- Title Transcription
- キノウセイ ムキマク ノ セイゾウ ト オウヨウ
- Author/Editor
- 新無機膜研究会 編上條榮治 監修
- Author Heading
- 新無機膜研究会 シン ムキマク ケンキュウカイ ( 01051923 )Authorities上條, 榮治, 1935- カミジョウ, エイジ, 1935- ( 00877928 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2006.6
- Publication Date (W3CDTF)
- 2006
- Extent
- 305p